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SOI High Temperature Pressure Sensor

SOI High Temperature Pressure Sensor

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High Temperature Pressure Sensor is a kind of high temperature MEMS sensor based on SOI semiconductor materiel . Its operating temperature is -30~180°C. With advanced beam--diaphragm structure design and stress equipartition technology adopted, HPT series sensors have the advantages of high temperature resistance, transient high temperature shock immunity, high measuring range and high overload which make it ideal for pressure self-control testing equipments used in aerospace / aviation, energy transportation, oil exploitation, heat process automation in Chemical industry, metallurgical automation, automotive sensors etc.

  HPT series sensors have been widely used for measuring diesel spray pressure in the self-control testing components of diesel engines in vehicles and vessels. HPT sensors still can operate normally even though the environment temperature exceeds 180℃.
  HPT sensors are produced first by ion implanting the four piezoresistors into silicon. The four resistors are connected in a Wheatstone bridge arrangement, whereby two resistors increase with positive pressure while the other two decrease in resistance. When pressure is applied to the device and two ports of the resistor bridge are supplied with power source, the other two ports will output an electric signal which is directly proportional to pressure. Stress equipartition technology is introduced into the design of die, making the device more robust against high overload. Furthermore, the resistors are isolated with insulating medium which guarantees the high steadiness of sensor device.

量程范围
Part Number
灵敏度(满量程输出)
非线性(Typical)
在线订购
KPa
bar
psi
20
0.2
2.9
VFS ≥ 40mV
NL ≤ 0.2%
40
0.4
5.8
VFS ≥ 40mV
NL ≤ 0.2%
100
1
14.5
VFS ≥ 40mV
NL ≤ 0.2%
200
2
29
VFS ≥ 40mV
NL ≤ 0.2%
700
7
101.5
VFS ≥ 40mV
NL ≤ 0.2%
1000
10
145
VFS ≥ 40mV
NL ≤ 0.2%
2000
20
290
VFS ≥ 40mV
NL ≤ 0.2%
4000
40
580
VFS ≥ 40mV
NL ≤ 0.2%
6000
60
870
VFS ≥ 40mV
NL ≤ 0.2%
25000
250
3625
VFS ≥ 40mV
NL ≤ 0.2%
40000
400
5800
VFS ≥ 40mV
NL ≤ 0.2%

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